Features of epitaxial growth of YBCO in the windows of the preliminary topology mask

This work is devoted to the study of epitaxial YBCO films obtained by laser sputtering during deposition into windows special preliminary topology mask. The morphology surface structures was studied electron microscopy, electrical characteristics superconducting bridges were measured: critical temperature and current density. possibility forming a given with defect-free regions micron sizes while maintaining high electrophysical parameters superconductor shown. opens up reproducibly submicron-scale elements in created areas using ion etching or implantation. Keywords: nano- microstructures, defects, growth local areas, YBCO.